发明授权
- 专利标题: Semiconductor acceleration sensor
- 专利标题(中): 半导体加速度传感器
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申请号: US844323申请日: 1997-04-18
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公开(公告)号: US6006606A公开(公告)日: 1999-12-28
- 发明人: Masataka Shinogi , Yutaka Saitoh , Kenji Kato
- 申请人: Masataka Shinogi , Yutaka Saitoh , Kenji Kato
- 申请人地址: JPX
- 专利权人: Seiko Instruments R&D Center Inc.
- 当前专利权人: Seiko Instruments R&D Center Inc.
- 当前专利权人地址: JPX
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G01P15/12 ; H01L29/84
摘要:
A semiconductor acceleration sensor comprises a sensor element having a first surface for receiving an acceleration force and second opposite surfaces disposed generally perpendicular to the first surface, a support for supporting and fixing the sensor element, and a detecting device disposed on the second opposite surfaces of the sensor element for detecting a variation of a physical quantity due to an acceleration force applied to the first surface of the sensor element.
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