发明授权
US6011390A Sensor chip with magnetoresistive wheatstone bridges for determining
magnetic field directions
失效
具有磁阻惠斯通电桥的传感器芯片用于确定磁场方向
- 专利标题: Sensor chip with magnetoresistive wheatstone bridges for determining magnetic field directions
- 专利标题(中): 具有磁阻惠斯通电桥的传感器芯片用于确定磁场方向
-
申请号: US973608申请日: 1997-12-11
-
公开(公告)号: US6011390A公开(公告)日: 2000-01-04
- 发明人: Uwe Loreit , Fritz Dettman , Wulf Andra
- 申请人: Uwe Loreit , Fritz Dettman , Wulf Andra
- 申请人地址: DEX Wetzlar
- 专利权人: Institut fur Mikrostrukturtechnologie und Optoelektronik E.V.
- 当前专利权人: Institut fur Mikrostrukturtechnologie und Optoelektronik E.V.
- 当前专利权人地址: DEX Wetzlar
- 优先权: DEX19521617 19950614
- 主分类号: G01D5/14
- IPC分类号: G01D5/14 ; G01D5/16 ; G01R33/09 ; G01B7/30
摘要:
An arrangement for a magnetoresistive sensor chip has two Wheatstone brid to determine the sine and cosine of the angle formed between a chip edge and the direction of the magnetic field. All resistances of the bridges consist of a plurality of magnetoresistive laminated elements (2) with current connections made of highly conductive thin films with parallel edges. When the resistances of a bridge are directly electrically interconnected, these edges form angles (5) of 90.degree. each. The parallel edges of the corresponding resistances of the sine and cosine bridges are mutually offset by 45.degree.. The magnetoresistive laminated elements (2) are distributed on the chip surface to reduce angle measurement errors to a minimum. Also disclosed are arrangements that allow the sensor chips to be used for measuring angles and positions.
公开/授权文献
信息查询