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US6019665A Controlled retention of slurry in chemical mechanical polishing 失效
控制浆料在化学机械抛光中的保留

Controlled retention of slurry in chemical mechanical polishing
摘要:
A weir with locks is used to encompass a platen used for chemical-mechanical polishing. The weir retains slurry that would otherwise be flung from a rotating platen because of centrifugal force. However, the locks permit some slurry to leave the platen, which enables the polishing process to include desirable flows of fresh slurry through the polishing pad to replenish polishing components and to flush out deleterious waste products. Additionally, the effective orifice size of the locks may be made a function of platen rotation rate. Polishing processes are possible in which the depth of the polishing slurry on the platen is a function of platen rotation rate.
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