发明授权
- 专利标题: Controlled retention of slurry in chemical mechanical polishing
- 专利标题(中): 控制浆料在化学机械抛光中的保留
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申请号: US070587申请日: 1998-04-30
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公开(公告)号: US6019665A公开(公告)日: 2000-02-01
- 发明人: Michael G. Lee , Solomon I. Beilin
- 申请人: Michael G. Lee , Solomon I. Beilin
- 申请人地址: JPX
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX
- 主分类号: B24B37/04
- IPC分类号: B24B37/04 ; B24B57/02 ; B24B1/00
摘要:
A weir with locks is used to encompass a platen used for chemical-mechanical polishing. The weir retains slurry that would otherwise be flung from a rotating platen because of centrifugal force. However, the locks permit some slurry to leave the platen, which enables the polishing process to include desirable flows of fresh slurry through the polishing pad to replenish polishing components and to flush out deleterious waste products. Additionally, the effective orifice size of the locks may be made a function of platen rotation rate. Polishing processes are possible in which the depth of the polishing slurry on the platen is a function of platen rotation rate.
公开/授权文献
- USD398387S Combined fan and clock 公开/授权日:1998-09-15
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