发明授权
US6023379A Method and apparatus for aligning an objective lens 失效
用于对准物镜的方法和装置

Method and apparatus for aligning an objective lens
摘要:
An apparatus for aligning an actuator lens within a baseplate using a beam of radiant energy. The actuator lens has an actuator optical axis and an actuator optical center and the apparatus includes a frame, a cradle, a tower assembly, a lever assembly, and a gripper assembly. The cradle assembly is employed to hold the baseplate and is mounted to the frame with at least one degree of freedom of motion. The tower assembly defines a tower axis and is also mounted to the frame. The cradle and tower assemblies are positioned to receive the beam of radiant energy along the tower axis and analyze a spot profile of the beam. The lever assembly is rotatably mounted to the frame and the gripper assembly is mounted to the lever assembly.
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