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US6030451A Two camera diameter control system with diameter tracking for silicon ingot growth 失效
两个相机直径控制系统,具有硅锭生长的直径跟踪

Two camera diameter control system with diameter tracking for silicon
ingot growth
Abstract:
A method and apparatus for measuring and controlling the diameter of a silicon single crystal ingot grown by the Czochralski technique using dual optical cameras focused on diametrically opposed edges of the meniscus of the growing crystal to measure the actual crystal diameter. The crystal growth parameters can be adjusted in response to the measured diameter to maintain a constant, desired diameter. The method and apparatus of the invention provide a continuous accurate measurement of the crystal diameter and avoid unnecessary adjustments to the crystal growth conditions resulting from diameter measurement errors due to the effects of crystal orbit, melt level changes and camera angle variations.
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