发明授权
- 专利标题: Quartz substrate heater
- 专利标题(中): 石英基板加热器
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申请号: US964385申请日: 1997-11-06
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公开(公告)号: US6037574A公开(公告)日: 2000-03-14
- 发明人: Christopher C. Lanham , Kevin Ptasienski , Louis P. Steinhauser , Robin H. Lake , James H. Kreisel
- 申请人: Christopher C. Lanham , Kevin Ptasienski , Louis P. Steinhauser , Robin H. Lake , James H. Kreisel
- 申请人地址: MO St. Louis
- 专利权人: Watlow Electric Manufacturing
- 当前专利权人: Watlow Electric Manufacturing
- 当前专利权人地址: MO St. Louis
- 主分类号: H05B3/46
- IPC分类号: H05B3/46 ; H05B3/10 ; H05B3/28 ; H05B3/44
摘要:
An electric, resistance element heater utilizes quartz as a sheath material and has a resistance (heating) element that is in intimate, substantially continuous contact with a surface of the quartz. This allows the heater to operate in any one or all of the three modes of heat transfer, namely, radiation, conduction and convection. Such intimate, substantially continuous contact of the resistance element is achieved by applying the element in direct contact with the quartz surface. This is accomplished by applying a heating circuit directly to the quartz surface, which heating element can be a foil element, or a thick or a thin film deposition element. The overall heater is formed by covering the heater element by a quartz sheath and attaching leads formed on the ends of the heater element to a source of electric energy. Sensors such as thermocouples, RTD's and the like can also be incorporated directly into the heater structure. Also, the heater can be fashioned into a variety of shapes.
公开/授权文献
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