发明授权
US6042922A Adhesive sheet for wafer setting and process for producing electronic
component
失效
用于晶片定型的粘合片和用于生产电子元件的方法
- 专利标题: Adhesive sheet for wafer setting and process for producing electronic component
- 专利标题(中): 用于晶片定型的粘合片和用于生产电子元件的方法
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申请号: US28147申请日: 1998-02-23
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公开(公告)号: US6042922A公开(公告)日: 2000-03-28
- 发明人: Hideo Senoo , Takashi Sugino , Shunsaku Node
- 申请人: Hideo Senoo , Takashi Sugino , Shunsaku Node
- 申请人地址: JPX
- 专利权人: Lintec Corporation
- 当前专利权人: Lintec Corporation
- 当前专利权人地址: JPX
- 优先权: JPX9-039196 19970224
- 主分类号: C09J7/02
- IPC分类号: C09J7/02 ; C09J201/00 ; H01L21/301 ; H01L21/58 ; B32B3/02
摘要:
An adhesive sheet for wafer setting, comprising a wafer setting part composed of an expansible film and an adhesive layer for wafer setting and a marginal part outside the wafer setting part,wherein the marginal part has an antiexpansibility greater than that of the wafer setting part. This enables secure expansion in a process for producing an electronic component.
公开/授权文献
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