发明授权
US6042922A Adhesive sheet for wafer setting and process for producing electronic component 失效
用于晶片定型的粘合片和用于生产电子元件的方法

Adhesive sheet for wafer setting and process for producing electronic
component
摘要:
An adhesive sheet for wafer setting, comprising a wafer setting part composed of an expansible film and an adhesive layer for wafer setting and a marginal part outside the wafer setting part,wherein the marginal part has an antiexpansibility greater than that of the wafer setting part. This enables secure expansion in a process for producing an electronic component.
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