发明授权
US6046594A Method and apparatus for monitoring parameters of an RF powered load in
the presence of harmonics
失效
在存在谐波的情况下监视RF供电负载的参数的方法和装置
- 专利标题: Method and apparatus for monitoring parameters of an RF powered load in the presence of harmonics
- 专利标题(中): 在存在谐波的情况下监视RF供电负载的参数的方法和装置
-
申请号: US798881申请日: 1997-02-11
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公开(公告)号: US6046594A公开(公告)日: 2000-04-04
- 发明人: Anton Mavretic
- 申请人: Anton Mavretic
- 申请人地址: NJ Voorhees
- 专利权人: Advanced Energy Voorhees, Inc.
- 当前专利权人: Advanced Energy Voorhees, Inc.
- 当前专利权人地址: NJ Voorhees
- 主分类号: G01N27/66
- IPC分类号: G01N27/66 ; G01R25/00 ; G01R27/02 ; G01R27/26 ; G01N27/62
摘要:
A method and apparatus for measuring electrical characteristics (e.g. current, voltage, phase, etc.) between a power source and a load at a set of harmonic frequencies to determine information about the load (e.g., load impedance, power dissipation, etc). According to one aspect of the invention, a first circuit detects a set of electrical characteristics (e.g., current, voltage, and/or phase) of a signal between the power source and the load. A second circuit, coupled to the first circuit to receive the set of electrical characteristics, provides data representing the set of electrical characteristics at a harmonic frequency associated with the signal. A third circuit, coupled to the second circuit, receives the data and determines information about the load (e.g., impedance, power dissipation, discharge current, etc.) at the harmonic frequency. The information could be used in any number of ways, such as controlling an impedance matching network that may be used in conjunction with the power source and the load, identifying/monitoring a load condition(s), etc.
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