发明授权
US6049115A Scanning probe microscope, and semiconductor distortion sensor for use
therein
失效
扫描探针显微镜和半导体失真传感器用于其中
- 专利标题： Scanning probe microscope, and semiconductor distortion sensor for use therein
- 专利标题（中）： 扫描探针显微镜和半导体失真传感器用于其中
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申请号： US842845申请日： 1997-04-17
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公开(公告)号： US6049115A公开(公告)日： 2000-04-11
- 发明人: Hiroshi Takahashi , Nobuhiro Shimizu , Yoshiharu Shirakawabe
- 申请人： Hiroshi Takahashi , Nobuhiro Shimizu , Yoshiharu Shirakawabe
- 申请人地址： JPX
- 专利权人： Seiko Instruments Inc.
- 当前专利权人： Seiko Instruments Inc.
- 当前专利权人地址： JPX
- 优先权： JPX8-097120 19960418; JPX9-044372 19970227
- 主分类号： G01B7/16
- IPC分类号： G01B7/16 ; G01B7/34 ; H01L29/84 ; H01L29/82 ; G01N23/00 ; G01P9/00 ; G01P15/00
摘要：
A semiconductor distortion sensor comprises a flexible cantilever having a free end portion and a fixed end portion. A p-type region and an n-type region define a pn junction formed in a preselected region of the cantilever where stress-caused distortion occurs due to flexure of the cantilever upon displacement of the free end portion of the cantilever. When the free end portion of the cantilever is subjected to displacement, the cantilever is flexed and the amount of displacement of the free end portion of the cantilever is detected on the basis of a change in an electrical characteristic of the pn junction.
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