发明授权
- 专利标题： Compact high resolution grating spectrometer
- 专利标题（中）： 紧凑型高分辨率光栅光谱仪
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申请号： US236148申请日： 1999-01-22
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公开(公告)号： US6061129A公开(公告)日： 2000-05-09
- 发明人: Alexander I. Ershov , Gamaralalage G. Padmabandu , Palash P. Das
- 申请人： Alexander I. Ershov , Gamaralalage G. Padmabandu , Palash P. Das
- 申请人地址： CA San Diego
- 专利权人： Cymer, Inc.
- 当前专利权人： Cymer, Inc.
- 当前专利权人地址： CA San Diego
- 主分类号： G01J3/18
- IPC分类号： G01J3/18 ; G01J3/22
摘要：
A compact high resolution grating spectrometer. A beam of expanding light from a light source is collimated and the collimated beam is expanded with a beam expander before illuminating a reflecting grating. The expansion of the beam permits high resolution in a small package. In preferred embodiments mirror arrangements are provided to produce double reflections off the reflecting grating to further improve the resolution of the spectrometer.
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