发明授权
- 专利标题： Method of forming coating film and apparatus therefor
- 专利标题（中）： 成膜方法及其设备
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申请号： US287193申请日： 1999-04-06
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公开(公告)号： US6063190A公开(公告)日： 2000-05-16
- 发明人: Keizo Hasebe , Akihiro Fujimoto , Hiroichi Inada , Hiroyuki Iino , Shinzi Kitamura , Masatoshi Deguchi , Mitsuhiro Nambu
- 申请人： Keizo Hasebe , Akihiro Fujimoto , Hiroichi Inada , Hiroyuki Iino , Shinzi Kitamura , Masatoshi Deguchi , Mitsuhiro Nambu
- 申请人地址： JPX Tokyo JPX Tosu
- 专利权人： Tokyo Electron Limited,Tokyo Electron Kyushu Limited
- 当前专利权人： Tokyo Electron Limited,Tokyo Electron Kyushu Limited
- 当前专利权人地址： JPX Tokyo JPX Tosu
- 优先权： JPX5-92579 19930325; JPX5-132594 19930510; JPX5-183442 19930630; JPX5-183443 19930630; JPX5-343717 19931216; JPX5-343722 19931216; JPX5-347348 19931224; JPX5-348812 19931227; JPX5-354052 19931228; JPX5-354054 19931228
- 主分类号： B05C11/08
- IPC分类号： B05C11/08 ; G03F7/16 ; B05C5/00
摘要：
An apparatus for forming a coating film, comprises a spin chuck for supporting a substrate with one surface facing upward and rotating the substrate about a vertical axis, a first nozzle for supplying a solvent of a coating solution on the substrate, and a second nozzle for supplying the coating solution on a central portion of the substrate. The first and second nozzles are supported by a head such that the supported nozzle moves between a dropping position above the substrate and a waiting position offset from the substrate. The solvent and coating solution are diffused along the surface of the substrate by rotating the spin chuck.
公开/授权文献
- US4921206A Snap-together solenoid operated pinch valve assembly 公开/授权日：1990-05-01
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