Invention Grant
- Patent Title: Shape measuring device
- Patent Title (中): 形状测量装置
-
Application No.: US149138Application Date: 1998-09-08
-
Publication No.: US6075605APublication Date: 2000-06-13
- Inventor: Ikuo Futamura , Manabu Okuda , Susumu Shibata
- Applicant: Ikuo Futamura , Manabu Okuda , Susumu Shibata
- Applicant Address: JPX Komaki JPX Nagoya
- Assignee: CKD Corporation,Kabushiki Kaisha Nextar
- Current Assignee: CKD Corporation,Kabushiki Kaisha Nextar
- Current Assignee Address: JPX Komaki JPX Nagoya
- Priority: JPX9-243946 19970909; JPX10-192166 19980707
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/25
Abstract:
A shape measuring device includes a light source for generating slit light beam and a polygon mirror for scanning the light beam and illuminating an object to be measured. The device further includes space-coding light beam controlling means, phase-shifting light beam controlling means, and a CCD camera which picks up an optical image of an object to be measured obtained by illumination of the light beam. The space-coding light beam controlling means controls light beam whose distribution of integrated illumination has a stripe patter in accordance with a predetermined code and the phase-shifting light beam controlling means controls light beam whose distribution of integrated illumination has a sine-wave like pattern. The distribution of integrated illumination intensity is possessed by the light beam illuminating within a time period for picking up one frame. With the picked up image information, space-coding shape operating means calculates a rough shape of the object to be measured, phase-shifting shape operating means calculates a precise shape of the object be measured, and then shape combining/operating means combines and calculates the shape of the object to be measured. Because the device combines a rough shape measured with wide range and a precise shape measured with high resolving power, the device can measure shape with wide dynamic range and with high resolution power.
Public/Granted literature
- US5394264A Electrochromic window, based on a polymeric polyepoxy electrolyte Public/Granted day:1995-02-28
Information query