Invention Grant
- Patent Title: Quasi-static fiber pressure sensor
- Patent Title (中): 准静态纤维压力传感器
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Application No.: US159566Application Date: 1998-09-24
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Publication No.: US6078706APublication Date: 2000-06-20
- Inventor: Gregory Nau , Dominique M. Dagenais , Frank Bucholtz
- Applicant: Gregory Nau , Dominique M. Dagenais , Frank Bucholtz
- Applicant Address: DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: DC Washington
- Main IPC: A61B5/0452
- IPC: A61B5/0452 ; A61B5/0402 ; A61B5/0456 ; A61N1/365 ; A61N1/37 ; G01B9/02 ; G01D5/353 ; G06F9/38
Abstract:
This invention is a quasi-static fiber pressure sensor using self-referenced interferometry based on a broadband semiconductor source which probes the pressure plate deflection within a Fabry-Perot cavity where phase is demodulated with a dual grating spectrometer providing real-time, high resolution remote measurement of pressure using optical interrogation of a deflecting pressure plate. This technique yields absolute gap measurement in real time over a wide range of gap lengths with nanometer resolution. By tailoring the pressure plate design to cover the range of gaps and deflection that can be resolved, pressure sensing with psi resolution can be obtained in a kpsig pressure range.
Public/Granted literature
- US5506176A Method of making a semiconductor device having a process of hydrogen annealing Public/Granted day:1996-04-09
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