发明授权
US6081000A AlAs oxide insulating layer between a conductive III-V substrate and an optoelectronic semiconductor device and method of manufacturing thereof 有权
导电III-V基片与光电半导体器件之间的AlAs氧化物绝缘层及其制造方法

  • 专利标题: AlAs oxide insulating layer between a conductive III-V substrate and an optoelectronic semiconductor device and method of manufacturing thereof
  • 专利标题(中): 导电III-V基片与光电半导体器件之间的AlAs氧化物绝缘层及其制造方法
  • 申请号: US68573
    申请日: 1998-09-14
  • 公开(公告)号: US6081000A
    公开(公告)日: 2000-06-27
  • 发明人: Alfred Lell
  • 申请人: Alfred Lell
  • 申请人地址: DEX Munich
  • 专利权人: Siemens Aktiengesellschaft
  • 当前专利权人: Siemens Aktiengesellschaft
  • 当前专利权人地址: DEX Munich
  • 优先权: DEX19640005 19960927
  • 主分类号: H01L27/06
  • IPC分类号: H01L27/06 H01L33/00
AlAs oxide insulating layer between a conductive III-V substrate and an
optoelectronic semiconductor device and method of manufacturing thereof
摘要:
An optoelectronic semiconductor device, whereby at least one functional semiconductor structure is arranged on a II-V semiconductor substrate. Inventively, an electrically conductive III-V semiconductor substrate is provided that exhibits a charge carrier concentration of more than 1*10.sup.15 cm.sup.-3. At least one electrically insulating oxide layer is provided between the functional semiconductor structure and the III-V semiconductor substrate.
公开/授权文献
信息查询
0/0