发明授权
- 专利标题： Semiconductor device having alignment mark
- 专利标题（中）： 具有对准标记的半导体器件
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申请号： US39340申请日： 1998-03-16
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公开(公告)号： US6081040A公开(公告)日： 2000-06-27
- 发明人: Shoichi Okuda , Mitsuhiro Saitou , Hiroyuki Ban
- 申请人： Shoichi Okuda , Mitsuhiro Saitou , Hiroyuki Ban
- 申请人地址： JPX Kariya
- 专利权人： Denso Corporation
- 当前专利权人： Denso Corporation
- 当前专利权人地址： JPX Kariya
- 优先权： JPX9-063245 19970317
- 主分类号： H01L27/04
- IPC分类号： H01L27/04 ; H01L21/822 ; H01L23/544 ; H01L21/465
摘要：
An alignment mark for determining a position of a thin film resistor formed on a semiconductor chip. The alignment mark is disposed on a capacitor formation region of the semiconductor chip. Because aluminum wiring members of the semiconductor chip are not disposed adjacent to the alignment mark within the capacitor formation region, the alignment mark can be precisely recognized. As a result, the position of the thin film resistor can be also precisely determined.
公开/授权文献
- USD371302S Dowel punch 公开/授权日：1996-07-02