Invention Grant
- Patent Title: Silicon germanium heterostructure bipolar transistor with indium doped base
- Patent Title (中): 硅锗异质结双极晶体管掺杂铟基
-
Application No.: US127373Application Date: 1998-07-31
-
Publication No.: US6087683APublication Date: 2000-07-11
- Inventor: Clifford A. King , Isik C. Kizilyalli
- Applicant: Clifford A. King , Isik C. Kizilyalli
- Applicant Address: NJ Murray Hill
- Assignee: Lucent Technologies
- Current Assignee: Lucent Technologies
- Current Assignee Address: NJ Murray Hill
- Main IPC: H01L29/73
- IPC: H01L29/73 ; H01L21/331 ; H01L29/165 ; H01L29/167 ; H01L29/737 ; H05B35/00
Abstract:
The present invention provides, in one embodiment, a method of fabricating a heterostructure bipolar transistor. This particular embodiment comprises forming a n-type doped region in a semiconductor substrate to form a collector, epitaxially forming a base on the collector, epitaxially doping the base with indium while forming the base, and forming an emitter on the base. The base is epitaxially formed, and at the same time the base is doped with indium. In other words, the indium is epitaxially incorporated within the base as the base is being formed. In addition to the indium, the base may also be epitaxially doped with boron. Since, indium is incorporated into the base with the same epitaxial process used to form the base, the damage typically associated with conventional implantation processes are not present, and thus, the high annealing temperatures to repair the damage are not required. The base can be doped and formed at the same time; thereby, saving processing time.
Public/Granted literature
Information query
IPC分类: