发明授权
US6087719A Chip for multi-chip semiconductor device and method of manufacturing the same 失效
用于多芯片半导体器件的芯片及其制造方法

Chip for multi-chip semiconductor device and method of manufacturing the
same
摘要:
A plurality of chips each having two or more alignment holes for transmitting a laser beam are stacked. The laser beam is irradiated onto the uppermost or lowermost one of the stacked chips. A photodetector detects the laser beam output from the stacked chips through the alignment holes in these chips. The positions of the chips are so controlled that the amount of the light detected by this photodetector is a maximum.
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