发明授权
- 专利标题: Method to improve the adhesion of a molding compound to a semiconductor chip comprised with copper damascene structures
- 专利标题(中): 提高模塑料对铜镶嵌结构的半导体芯片的附着力的方法
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申请号: US421511申请日: 1999-10-20
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公开(公告)号: US6090696A公开(公告)日: 2000-07-18
- 发明人: Syun-Ming Jang , Mong-Song Liang
- 申请人: Syun-Ming Jang , Mong-Song Liang
- 申请人地址: TWX Hsin-Chu
- 专利权人: Taiwan Semicondutor Manufacturing Company
- 当前专利权人: Taiwan Semicondutor Manufacturing Company
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/31 ; H01L21/44
摘要:
A process used to create a non-smooth, top surface topography, for a semiconductor substrate, needed to improve the adhesion between a protective molding compound, and the underlying top surface of the semiconductor substrate, has been developed. The process features the creation of the non-smooth, top surface topography, including either: recessed, or etched back, copper damascene structures, in an insulator layer; or copper damascene structures, in a recessed, or etched back, insulator layer. The recessing of the copper damascene structures, or of the insulator layer, is accomplished via selective, dry or wet etch procedures. After formation of a gold wire bond, on the top surface of a copper damascene structure, a protective molding compound is applied, to the underlying, non-smooth, top surface topography.
公开/授权文献
- US5561337A Ultrasonic vibrating actuator 公开/授权日:1996-10-01
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