Invention Grant
US6091847A Automated visual inspection apparatus for detecting defects and for
measuring defect size
失效
用于检测缺陷和测量缺陷尺寸的自动目视检查装置
- Patent Title: Automated visual inspection apparatus for detecting defects and for measuring defect size
- Patent Title (中): 用于检测缺陷和测量缺陷尺寸的自动目视检查装置
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Application No.: US26965Application Date: 1998-02-20
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Publication No.: US6091847APublication Date: 2000-07-18
- Inventor: Chinchuan Chiu , Philip Paolella , Michael Leary , Joseph A. Marcanio , Fusao Ishii
- Applicant: Chinchuan Chiu , Philip Paolella , Michael Leary , Joseph A. Marcanio , Fusao Ishii
- Applicant Address: JPX Tokyo NJ Park Ridge
- Assignee: Sony Corporation,Sony Electronics, Inc.
- Current Assignee: Sony Corporation,Sony Electronics, Inc.
- Current Assignee Address: JPX Tokyo NJ Park Ridge
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06K9/00
Abstract:
Apparatus for detecting etch defects in an object having a plurality of openings by generating an image signal of the object representing light intensity values of a plurality of pixels, processing the image signal to form data signals representing light intensity values of groups of pixels, filtering the data signals to remove signals representing the ends of the openings, and pairing two data signals when the groups of pixels represented thereby represent an etch defect.
Public/Granted literature
- US5382485A Process for storing information Public/Granted day:1995-01-17
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