发明授权
US6096582A Method of making a semiconductor device 失效
制造半导体器件的方法

Method of making a semiconductor device
摘要:
A method of making a semiconductor device is disclosed in which the device has an insulated gate transistor in which source and drain regions are provided in a single crystal semiconductor layer formed on an insulating layer with a channel region interposed between the source and drain regions. The insulating layers just below the source and drain regions are made thicker than an insulating layer just below the channel region. The method uses substrate bonding to achieve the device.
公开/授权文献
信息查询
0/0