A method of compacting a fumed metal oxide-containing composition is disclosed. In the method of the present invention, the fumed metal oxide-containing composition is treated with vapor comprising water such that the vapor is adsorbed into the fumed metal oxide so as to produce a vapor-treated fumed metal oxide-containing composition. Pressure is applied to the vapor-treated fumed metal oxide-containing composition to reduce the volume of the metal oxide-containing composition so as to produce a compacted metal oxide-containing composition, which is characterized by a volume springback that is less than the volume springback of the same compacted metal oxide-containing composition prepared in the absence of said vapor treatment.