- 专利标题: Method and apparatus for fabricating near spherical semiconductor single crystal particulate and the spherical product produced
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申请号: US173434申请日: 1998-10-15
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公开(公告)号: US6106614A公开(公告)日: 2000-08-22
- 发明人: Matthew D. Stephens , Steven A. Miller , Jessica Belcher
- 申请人: Matthew D. Stephens , Steven A. Miller , Jessica Belcher
- 申请人地址: MA Concord
- 专利权人: Starmet Corp
- 当前专利权人: Starmet Corp
- 当前专利权人地址: MA Concord
- 主分类号: B22F9/08
- IPC分类号: B22F9/08 ; C30B11/00 ; C30B29/66 ; C30B30/08 ; H01L31/0352 ; H01L31/18 ; C30B17/00 ; B22F9/06
摘要:
An apparatus and a method for producing single crystal semiconductor particulate in near spherical shape and the particulate product so formed is accomplished by producing uniform, monosized, near spherical droplets; identifying the position of an undercooled droplet in a nucleation zone; and seeding the identified droplet in the nucleation zone to initiate single crystal growth in the droplet.
公开/授权文献
- US4930893A Electrophoresis imaging system 公开/授权日:1990-06-05
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