发明授权
US6106661A Polishing pad having a wear level indicator and system using the same
失效
具有磨损水平指示器的抛光垫和使用它的系统
- 专利标题: Polishing pad having a wear level indicator and system using the same
- 专利标题(中): 具有磨损水平指示器的抛光垫和使用它的系统
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申请号: US74892申请日: 1998-05-08
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公开(公告)号: US6106661A公开(公告)日: 2000-08-22
- 发明人: Christopher H. Raeder , Kevin D. Shipley , Peter A. Burke
- 申请人: Christopher H. Raeder , Kevin D. Shipley , Peter A. Burke
- 申请人地址: TX Austin
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: TX Austin
- 主分类号: B24B37/26
- IPC分类号: B24B37/26 ; B24D13/14 ; C23F1/02
摘要:
A polishing pad having a wear level indicator and a polishing system employing the same is provided. A polishing pad, in accordance with one embodiment of the invention, includes a pad structure and an indicator, disposed in the pad structure, indicating the wear level of the pad structure. The pad structure may, for example, include a top pad and a bottom pad with the indicator being disposed in the top pad. The wear level may, for example, be a critical thickness of the polishing pad which indicates the end of the pad lifetime or which indicates the need to change polishing processing. The use of a wear level indicator allows for efficient and reliable pad wear level indication.
公开/授权文献
- USD400222S Dyeing machine 公开/授权日:1998-10-27
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