发明授权
- 专利标题： Dual surface reflector
- 专利标题（中）： 双面反射镜
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申请号： US183796申请日： 1998-10-30
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公开(公告)号： US6108491A公开(公告)日： 2000-08-22
- 发明人: Roger N. Anderson
- 申请人： Roger N. Anderson
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01L21/205
- IPC分类号： H01L21/205 ; H01L21/00 ; H01L21/26
摘要：
A dual surfaced mid-reflector employs two independently shaped faceted faces to direct radiant energy from separate heater lamp arrays to a substrate or substrate support to be heated. A dual surfaced mid-reflector can also be employed in conjunction with a peripheral cylindical reflect or and a central cylindrical reflector to further direct radiation to specific regions on a substrate or substrate support. In addition, a dual surfaced mid-reflector can also be employed in conjunction with heater lamps where the radiation of individual lamps is further directed by focusing reflectors or dispersive reflectors.
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