发明授权
US06113449A Method of fabricating a front plate for a plasma display panel 有权
制造等离子体显示面板的前板的方法

Method of fabricating a front plate for a plasma display panel
摘要:
A front plate for a plasma display panel (PDP) and its modified fabricating method are provided using a backside exposure process and an appropriate processing sequence rearrangement to reduce the number of photomasks required and improve the accuracy of exposure and developing process. First, a light-shielding layer is patterned by performing a mesh printing process, or by performing an exposure and developing process using a first photomask, so as to form a light-shielding structure including black stripes and transparent electrodes' gaps. Next, using the light-shielding structure as a mask, a backside exposure and developing process as well as an etching process is performed to form a plurality of pairs of transparent electrodes on the substrate. Then, using a second photomask, another set of exposure, developing and etching processes are performed to form a plurality of pairs of metal electrodes on the corresponding transparent electrodes.
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