发明授权
- 专利标题: Method of fabricating a front plate for a plasma display panel
- 专利标题(中): 制造等离子体显示面板的前板的方法
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申请号: US351969申请日: 1999-07-12
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公开(公告)号: US06113449A公开(公告)日: 2000-09-05
- 发明人: Wen-Fa Sung , Jin-Yuh Lu , Yao-Ching Su
- 申请人: Wen-Fa Sung , Jin-Yuh Lu , Yao-Ching Su
- 申请人地址: TWX Hsinchu
- 专利权人: Acer Display Technology, Inc.
- 当前专利权人: Acer Display Technology, Inc.
- 当前专利权人地址: TWX Hsinchu
- 优先权: TWX87111339 19980713
- 主分类号: H01J9/02
- IPC分类号: H01J9/02
摘要:
A front plate for a plasma display panel (PDP) and its modified fabricating method are provided using a backside exposure process and an appropriate processing sequence rearrangement to reduce the number of photomasks required and improve the accuracy of exposure and developing process. First, a light-shielding layer is patterned by performing a mesh printing process, or by performing an exposure and developing process using a first photomask, so as to form a light-shielding structure including black stripes and transparent electrodes' gaps. Next, using the light-shielding structure as a mask, a backside exposure and developing process as well as an etching process is performed to form a plurality of pairs of transparent electrodes on the substrate. Then, using a second photomask, another set of exposure, developing and etching processes are performed to form a plurality of pairs of metal electrodes on the corresponding transparent electrodes.
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