发明授权
US6117772A Method and apparatus for blanket aluminum CVD on spherical integrated circuits 失效
球形集成电路上用于毯式铝CVD的方法和装置

Method and apparatus for blanket aluminum CVD on spherical integrated
circuits
摘要:
A method and apparatus for metal-organics chemical vapor deposition (MO CVD) of a metal layer upon a spherical substrate at atmospheric pressure are disclosed. The method includes pretreating the spherical substrate with a vapor of a first precursor in preparation for a deposition of a metal layer. The pretreated spherical substrate is then exposed to a thermally dissociated precursor of metal for depositing the metal layer onto the spherical substrate, wherein the exposure to the thermally dissociated precursor of metal provides a uniformly deposited metal layer coverage over the pretreated spherical substrate. The deposited metal layer is then annealed and cooled.
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