发明授权
- 专利标题: Manufacturing method of liquid crystal display panel and cleaning apparatus for use therein
- 专利标题(中): 液晶显示面板的制造方法及其使用的清洗装置
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申请号: US294331申请日: 1999-04-20
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公开(公告)号: US6118511A公开(公告)日: 2000-09-12
- 发明人: Hiroki Ohno , Hiroshi Osaki
- 申请人: Hiroki Ohno , Hiroshi Osaki
- 申请人地址: JPX Kumamoto
- 专利权人: Kabushiki Kaisha Advanced Display
- 当前专利权人: Kabushiki Kaisha Advanced Display
- 当前专利权人地址: JPX Kumamoto
- 优先权: JPX10-113850 19980423
- 主分类号: G02F1/13
- IPC分类号: G02F1/13 ; B08B3/12 ; B08B11/04 ; G02F1/1333 ; G02F1/1337
摘要:
A manufacturing method of a liquid crystal display panel of high display quality is provided, in which any foreign matter or stain on the surface of a substrate can be completely removed and occurrence of irregular orientation or spot is prevented in the cleaning step after rubbing in the manufacturing process of the liquid crystal display panel. A cleaning apparatus for carrying out the manufacturing method is also provided.In the cleaning step after rubbing, as a pre-cleaning treatment, the surface of the glass substrate 1 is sufficiently covered by the mist-like particles 20 sprayed from a binary fluid nozzle 7 to the extent that the water does not move. Then, the glass substrate 1 is subject to a wet cleaning such as supersonic wave cleaning.
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