发明授权
- 专利标题: Angular velocity sensor
- 专利标题(中): 角速度传感器
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申请号: US126277申请日: 1998-07-30
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公开(公告)号: US6119519A公开(公告)日: 2000-09-19
- 发明人: Masashi Konno , Sumio Sugawara , Nobuhisa Atoji , Jiro Terada , Masami Tamura
- 申请人: Masashi Konno , Sumio Sugawara , Nobuhisa Atoji , Jiro Terada , Masami Tamura
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX7-78713 19950404; JPX7-78714 19950404
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01P9/00
摘要:
The invention relates to an angular velocity sensor used in posture control of a moving element or navigation system, and is intended to realize higher sensitivity, lower offset, lower offset drift, lower translation acceleration sensitivity, and higher impact resistance in a small size and at low cost.Being made of ceramic piezoelectric material or crystal material, the constitution comprises four parallel oscillating arms 12 to 15, or 112 to 115, and a support member 11, or 111 for supporting one end of the oscillating arms or both ends commonly, in which outer two oscillating arms 12, 15, or 112, 115 of a compound tuning fork 10, or 110 in a comb shape of which position of the inside root of two oscillating arms each on inside and outside to the support member 11, or 111 in the oscillating arm direction is matched or different are used in the driving side tuning for, while inner two oscillating arms 13, 14, or 113, 114 are used in the detecting side tuning fork so as to correspond between driving and detection.
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