发明授权
US6121412A Preparation of fractionated novolak resins by a novel extraction
technique
失效
通过新的提取技术制备分馏的酚醛清漆树脂
- 专利标题: Preparation of fractionated novolak resins by a novel extraction technique
- 专利标题(中): 通过新的提取技术制备分馏的酚醛清漆树脂
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申请号: US418239申请日: 1999-10-14
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公开(公告)号: US6121412A公开(公告)日: 2000-09-19
- 发明人: Stanley F. Wanat , M. Dalil Rahman , John J. Kokoszka , Balaji Narasimhan
- 申请人: Stanley F. Wanat , M. Dalil Rahman , John J. Kokoszka , Balaji Narasimhan
- 申请人地址: VGX
- 专利权人: Clariant Finance (BVI) Limited
- 当前专利权人: Clariant Finance (BVI) Limited
- 当前专利权人地址: VGX
- 主分类号: C08G8/00
- IPC分类号: C08G8/00 ; C08G8/08 ; G03F7/023 ; C08F6/04 ; C08F6/22 ; C08G14/04
摘要:
The present invention provides a method for producing a film forming, fractionated novolak resin, by:a) condensing formaldehyde with one or more phenolic compounds, and thereby producing a novolak resin;b) adding a photoresist solvent, and optionally a water-soluble organic polar solvent;c) feeding the mixture into a liquid/liquid centrifuge and feeding a C.sub.5 -C.sub.8 alkane, water or aromatic hydrocarbon solvent into the liquid/liquid centrifuge at a ratio of optional water-soluble organic polar solvent and photoresist solvent to C.sub.5 -C.sub.8 alkane, water or aromatic solvent, of from 5:1 to 0.5:1;d) rotating the liquid/liquid centrifuge containing the mixture at a speed of at least 500 rpm and thereby separating the mixture into two phases, collecting the two phases;e) optionally separating the lighter phase (L) into two second phases;f) removing residual C.sub.5 -C.sub.8 alkane, water or aromatic hydrocarbon solvent from the heavier phase (H) from step d) and leaving the novolak resin dissolved in the photoresist solvent;A method is also provided for producing photoresist composition from such a fractionated novolak resin and for producing microelectronic devices using such a photoresist composition.
公开/授权文献
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