发明授权
US6124601A Position sensor having a reflective projecting system and device
fabrication method using the sensor
失效
具有反射投影系统的位置传感器和使用传感器的装置制造方法
- 专利标题： Position sensor having a reflective projecting system and device fabrication method using the sensor
- 专利标题（中）： 具有反射投影系统的位置传感器和使用传感器的装置制造方法
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申请号： US766755申请日： 1996-12-13
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公开(公告)号： US6124601A公开(公告)日： 2000-09-26
- 发明人: Minoru Yoshii , Masanobu Hasegawa , Kyoichi Miyazaki
- 申请人： Minoru Yoshii , Masanobu Hasegawa , Kyoichi Miyazaki
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX7-347938 19951215
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F9/00 ; H01L21/027 ; G01N21/86
摘要：
A position detecting apparatus for detecting the position of a substrate in an interval direction in which the substrate is spaced by an interval form a pattern-printing projection optical system for printing pattern on the substrate includes first and second luminous flux projecting and receiving systems and a detector. The first luminous flux projecting system projects a first luminous flux to the substrate form a direction oblique to the interval direction. The first luminous flux receiving system receives a first luminous flux after the first luminous flux is reflected form the substrate. The second luminous flux projecting system projects a second luminous flux to a reflection member secured to the bottom end of the pattern-printing projection optical system. The second luminous flux receiving system receives the second luminous flux after the second luminous flux is reflected by the reflection member. The detection detects the position of the substrate in the interval direction by detecting the position at which the first luminous flux receiving system receives the first luminous flux and by detecting the position at which the second luminous flux receiving system receives the second luminous flux.
公开/授权文献
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