发明授权
- 专利标题： Method of fabricating a fluid drop ejector
- 专利标题（中）： 制造液滴喷射器的方法
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申请号： US416290申请日： 1999-10-14
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公开(公告)号： US6127198A公开(公告)日： 2000-10-03
- 发明人: Charles P. Coleman , Arthur M. Gooray , George J. Roller , Kathleen A. Feinberg
- 申请人： Charles P. Coleman , Arthur M. Gooray , George J. Roller , Kathleen A. Feinberg
- 申请人地址： CT Stamford
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 当前专利权人地址： CT Stamford
- 主分类号： B41J2/14
- IPC分类号： B41J2/14 ; B41J2/16 ; H01L21/00
摘要：
The silicon fluid ejector of the present invention includes an electrostatically actuated micromachined positive displacement mechanism consisting of a piston, piston containment structure, piston retraction mechanism and an ejection orifice. These features provide for very low cost of production, high reliability and "on demand" drop size, modulation. The fluid ejector mechanism can be easily produced via monolithic batch fabrication based on the common production technique of surface micromachining.
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