发明授权
US6132492A Sorbent-based gas storage and delivery system for dispensing of
high-purity gas, and apparatus and process for manufacturing
semiconductor devices, products and precursor structures utilizing same
失效
用于分配高纯度气体的基于吸附剂的气体储存和输送系统，以及利用其制造半导体器件，产品和前体结构的装置和工艺
- 专利标题： Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
- 专利标题（中）： 用于分配高纯度气体的基于吸附剂的气体储存和输送系统，以及利用其制造半导体器件，产品和前体结构的装置和工艺
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申请号： US82596申请日： 1998-05-21
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公开(公告)号： US6132492A公开(公告)日： 2000-10-17
- 发明人: Steven J. Hultquist , Glenn M. Tom , Peter S. Kirlin , James V. McManus
- 申请人： Steven J. Hultquist , Glenn M. Tom , Peter S. Kirlin , James V. McManus
- 申请人地址： CT Danbury
- 专利权人： Advanced Technology Materials, Inc.
- 当前专利权人： Advanced Technology Materials, Inc.
- 当前专利权人地址： CT Danbury
- 主分类号： B01D53/04
- IPC分类号： B01D53/04 ; B01D53/22 ; B01D53/34 ; F17C11/00
摘要：
A sorbent-based gas storage and dispensing system, including a storage and dispensing vessel containing a solid-phase physical sorbent medium having a sorbate gas physically adsorbed thereon. A chemisorbent material is provided in the vessel to chemisorb the impurities for gas phase removal thereof in the storage and dispensing vessel. Desorbed sorbate gas is discharged from the storage and dispensing vessel by a dispensing assembly coupled to the vessel. The chemisorbent may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane, and installed in the vessel at the time of sorbent material loading. Semiconductor manufacturing processes and products manufactured by such processes are described.
公开/授权文献
- US5695826A Electrostatic powder coating apparatus and method 公开/授权日：1997-12-09