发明授权
US6134960A Thermal-type flow sensor 失效
热式流量传感器

Thermal-type flow sensor
摘要:
A thermal-type flow sensor capable of generating a monotonously increasing output over a time period of transition from a reverse flow to a forward flow with a simplified structure while exhibiting high sensitivity in the measurement of flow rate in the forward direction. The flow sensor includes a plurality of heat generating portions implemented by upstream heat-sensitive resistor (4) and downstream heat-sensitive resistor (5) within a passage (19) as viewed in a direction in which fluid flows through the passage (19), for thereby measuring a flow rate or a flowing speed of the fluid on the basis of heat transfer phenomenon taking place between the heat generating portions and the fluid. The flow sensor includes a heating current control means (30, 31, 32) for controlling heating currents flowing through the heat-sensitive resistors (4, 5) so that temperatures of the plurality of heat generating portions increase by predetermined values relative to the temperature of the fluid, a means (34) for determining difference between heating currents flowing through the upstream heat generating portion and the downstream heat generating portion, and means (35 to 37) for detecting the flowing speed or the flow rate of the fluid on the basis of the difference between the heating currents.
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