Invention Grant
- Patent Title: Coil and coil feedthrough
- Patent Title (中): 线圈和线圈馈通
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Application No.: US173664Application Date: 1998-10-15
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Publication No.: US6139679APublication Date: 2000-10-31
- Inventor: Peter Satitpunwaycha
- Applicant: Peter Satitpunwaycha
- Applicant Address: CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/3065
Abstract:
A coil for a plasma chamber in a semiconductor fabrication process comprises a continuous, one-piece conductive conduit having a first end and a second end positioned on the chamber exterior, a coil portion positioned in the chamber interior and a feedthrough portion positioned in an aperture of the chamber wall. Because the conduit lacks any joints between the feedthrough and the interior coil portions, a potential source of coolant leak is eliminated.
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