- 专利标题: Integrated infrared detection system
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申请号: US291680申请日: 1999-04-13
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公开(公告)号: US6140145A公开(公告)日: 2000-10-31
- 发明人: Dipankar Chandra , Donald F. Weirauch , Thomas C. Penn
- 申请人: Dipankar Chandra , Donald F. Weirauch , Thomas C. Penn
- 申请人地址: MA Lexington
- 专利权人: Raytheon Company
- 当前专利权人: Raytheon Company
- 当前专利权人地址: MA Lexington
- 主分类号: H01L27/144
- IPC分类号: H01L27/144 ; H01L31/103 ; H01L21/00
摘要:
This is an integral IR detector system with at least two epitaxial HgCdTe sensors on integrated silicon or GaAs circuitry and also a method of fabricating such system. The system can comprise: a) integrated silicon or GaAs circuitry 110; b) an epitaxial lattice-match layer (e.g. ZnSe 114) on a top surface of the circuit; c) an epitaxial insulating layer (e.g. CdTe 102) on the lattice-match layer; and d) at least two epitaxial HgCdTe sensors 101,121 on the insulating layer, with the HgCdTe sensors being electrically connected to the circuitry. Preferably, the circuitry is silicon. Preferably, an IR transparent, spacer layer (e.g. CdTe 120 or CdZnTe) is on the HgCdTe sensors and an HgCdTe filter 122 is on the spacer layer. Preferably, at least one of the HgCdTe sensors and the HgCdTe filter is laterally continuously graded.
公开/授权文献
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