A first object of the present invention is to provide a photosensor for use in an apparatus such as a copying machine, a printer etc. employing an electrophotographic technology which can prevent an image anomaly such as a blurring from generation even if it is exposed to a high-humidity ambient for a long period and subjected to multiple repetitions of numerous printing characters.A second object of the invention is to provide a photosensor for use in electrophotography which is excellent in surface abrasion durability, humidity resistivity etc.To satisfy the first purpose mentioned above, a photoconductive layer 2 formed of an amorphous layer including silicon atoms as a major element is deposited on a conductive substrate 1 formed of aluminium etc. A surface protective film 4 formed of another amorphous film including the silicon atoms as the main element, for instance, an a-SiC or an a-SiNC film is stacked on the layer 2 by adjusting a contact angle of the film 4 with de-ionized water measured in an open air ambient so as to be larger than about 76.degree..To satisfy the second purpose mentioned above, another photosensitive layer 13 is grown via an adhesion enhancement layer 12 onto another conductive substrate 11, on an outside of which another surface protective film 16 including nitrogen and carbon atoms as well as the silicon atoms also as the major element is deposited.