Invention Grant
- Patent Title: Apparatus and method for detecting impurities in wet chemicals
- Patent Title (中): 用于检测湿化学品中杂质的装置和方法
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Application No.: US069908Application Date: 1998-04-30
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Publication No.: US6145372APublication Date: 2000-11-14
- Inventor: Lindsey H. Hall , Jennifer Sees , Oliver Chyan
- Applicant: Lindsey H. Hall , Jennifer Sees , Oliver Chyan
- Applicant Address: TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: TX Dallas
- Main IPC: G01N27/416
- IPC: G01N27/416 ; G01N33/00 ; G01N27/403
Abstract:
A apparatus and method for monitoring impurities in wet chemicals in semiconductor wafer processing comprising a silicon sensor (12) that is electrically connected to a potentiometer (22), a reference electrode (14) electrically connected to the potentiometer (22), wherein a comparison in the potential between the silicon sensor (12) and the reference electrode (14) to a predetermined baseline is used to measure wet chemical impurities, is disclosed.
Public/Granted literature
- USD397070S Clutch plate Public/Granted day:1998-08-18
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