- 专利标题: Method for laser scanning flip-chip integrated circuits
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申请号: US187314申请日: 1998-11-04
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公开(公告)号: US6146014A公开(公告)日: 2000-11-14
- 发明人: Victoria J. Bruce , Michael R. Bruce
- 申请人: Victoria J. Bruce , Michael R. Bruce
- 申请人地址: CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: G01J5/00
- IPC分类号: G01J5/00 ; G01K11/00 ; G01N25/72
摘要:
Methods for analyzing temperature characteristics of an integrated circuit. In one embodiment, a beam of laser light is directed at the back side of an integrated circuit. The intensity level of laser light reflected from the integrated circuit is measured and compared to a reference intensity level. The magnitude of the difference between the reference intensity level and the intensity level of the reflected laser light is indicative of a temperature characteristic of the integrated circuit.
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