- 专利标题： Optical view port for chemical mechanical planarization endpoint detection
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申请号： US330472申请日： 1999-06-11
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公开(公告)号： US06146242A公开(公告)日： 2000-11-14
- 发明人: Randolph E. Treur , John M. Boyd , Stephan H. Wolf
- 申请人： Randolph E. Treur , John M. Boyd , Stephan H. Wolf
- 申请人地址： CA San Luis Obispo
- 专利权人： Strasbaugh, Inc.
- 当前专利权人： Strasbaugh, Inc.
- 当前专利权人地址： CA San Luis Obispo
- 主分类号： B24B49/04
- IPC分类号： B24B49/04 ; B24B37/013 ; B24B49/12 ; B24D7/12 ; H01L21/304 ; B24B49/00
摘要：
An optical endpoint system for a CMP system with a viewport located off-center on the platen, said view port being adjustable in height so that the window of the viewport can be made flush with the top of the polishing pad.
公开/授权文献
- US5524526A Vacuum motor for an automotive vehicle 公开/授权日：1996-06-11