发明授权
- 专利标题： Thermal ink jet printhead with increased heater resistor control
- 专利标题（中）： 热敏喷墨打印头具有增加的加热电阻控制
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申请号： US207071申请日： 1998-12-07
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公开(公告)号： US6146914A公开(公告)日： 2000-11-14
- 发明人: Cathie J. Burke , Alan D. Raisanen , Sean D. O'Brien
- 申请人： Cathie J. Burke , Alan D. Raisanen , Sean D. O'Brien
- 申请人地址： CT Stamford
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 当前专利权人地址： CT Stamford
- 主分类号： B41J2/14
- IPC分类号： B41J2/14 ; B41J2/16 ; H01L21/00
摘要：
An improved method is disclosed for forming heater elements for an ink jet printhead. The resistance is more closely controlled by doping a central heater region which is formed relatively thinner than the heavily doped heater regions which are used as the gate and contact areas. The thinner central region can doped relatively heavy in order to more accurately adjust the heater resistance.In another embodiment, the thin layer is amorphous silicon rather than the polysilicon to increase the latitude of the energy input.