发明授权
- 专利标题: Acceleration sensor and triaxial acceleration sensor
- 专利标题(中): 加速度传感器和三轴加速度传感器
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申请号: US161805申请日: 1998-09-28
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公开(公告)号: US06148671A公开(公告)日: 2000-11-21
- 发明人: Yoshiyuki Nakamizo , Hideki Kobayashi , Megumi Hashizaki
- 申请人: Yoshiyuki Nakamizo , Hideki Kobayashi , Megumi Hashizaki
- 申请人地址: JPX Toyama Pref.
- 专利权人: Hokuriku Electric Industry Co., Ltd.
- 当前专利权人: Hokuriku Electric Industry Co., Ltd.
- 当前专利权人地址: JPX Toyama Pref.
- 优先权: JPX9-261782 19970926; JPX9-275829 19971008; JPX10-266323 19980921
- 主分类号: G01P15/09
- IPC分类号: G01P15/09 ; G01P15/18 ; G01L1/00 ; G01L3/00
摘要:
An acceleration sensor capable of restraining a reduction in output thereof due to an electrostatic capacity between acceleration detecting electrodes and output electrodes. A low-dielectric layer is arranged between a connection line and a piezoelectric ceramic substrate. Another low-dielectric layer is arranged between additional connection lines and output electrodes, and the substrate. The low-dielectric layers are formed of a material substantially reduced in relative dielectric constant as compared with the substrate. The low-dielectric layers reduce an electrostatic capacity generated between wiring patterns and the output electrodes, and a counter electrode pattern, to thereby reduce the amount of spontaneous polarization charges accumulated in the electrostatic capacity.
公开/授权文献
- US4348257A Organic pigments 公开/授权日:1982-09-07
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