发明授权
- 专利标题： Method of manufacturing piezoelectric materials
- 专利标题（中）： 制造压电材料的方法
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申请号： US540028申请日： 1995-10-06
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公开(公告)号： US6156259A公开(公告)日： 2000-12-05
- 发明人: Motoyuki Nishizawa , Mineharu Tsukada , Kaoru Hashimoto , Nobuo Kamehara
- 申请人： Motoyuki Nishizawa , Mineharu Tsukada , Kaoru Hashimoto , Nobuo Kamehara
- 申请人地址： JPX Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX4-270041 19921008; JPX5-193731 19930804
- 主分类号： C04B35/46
- IPC分类号： C04B35/46 ; C04B35/472 ; C04B35/497 ; C04B35/499 ; C04B35/645 ; H01L41/187 ; H01L41/39 ; C04B33/32
摘要：
In a method of manufacturing piezoelectric ceramics by molding pre-fired or calcined powders of ingredients of a piezoelectric ceramic material and sintering the powder mold at a high pressure, the powder mold is pre-sintered at an atmospheric pressure before sintering at high pressure (HIP). Preferably, after the sintering HIP step, a thermal treatment is performed at a temperature of from 500 to 1000.degree. C. under an oxidizing atmosphere. For a Pb(Zn.sub.1/3 Nb.sub.2/3)O.sub.3 --PbTiO.sub.3 based piezoelectric ceramic, the composition is preferably set to (Pb.sub.1-x Ba.sub.x)[(Zn.sub.1/3 Nb.sub.2/3).sub.1-y Ti.sub.y ]O.sub.3, where 0.001
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