发明授权
US6160625A Laser scanner projection system for viewing features on substrates and on coated substrates 失效
激光扫描仪投影系统,用于观察基板和涂层基板上的特征

Laser scanner projection system for viewing features on substrates and
on coated substrates
摘要:
An inspection system for viewing substrate or coated substrate features, wherein a directed light source is projected through a coated substrate onto a viewing surface such that features or irregularities in the substrate or in the coating of the coated substrate are displayed. The inspection system includes a projection system including a light source positioned adjacent the second major surface of the optically transmissive substrate, and a viewing screen positioned adjacent the first major surface of the substrate. The substrate is positioned in optical alignment along an optical path between the light source and the viewing screen such that irregularities in the coated top surface of the substrate can be visually observed on the viewing screen by a user. In one aspect the substrate is coated. Optionally, the directed light source is a laser scanner assembly.
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