发明授权
- 专利标题： Method of forming an array of emitter tips
- 专利标题（中）： 形成发射器尖端阵列的方法
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申请号： US354529申请日： 1999-07-15
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公开(公告)号： US6165374A公开(公告)日： 2000-12-26
- 发明人: David A. Cathey , Kevin Tjaden
- 申请人： David A. Cathey , Kevin Tjaden
- 申请人地址： ID Boise
- 专利权人： Micron Technology, Inc.
- 当前专利权人： Micron Technology, Inc.
- 当前专利权人地址： ID Boise
- 主分类号： H01J9/02
- IPC分类号： H01J9/02 ; B44C1/22 ; H01L21/00
摘要：
A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres are for patterning the mask layer. Portions of the mask layer are selectively removed, thereby forming circular masks. The substrate is isotropically etched, thereby creating sharp asperities.
公开/授权文献
- US4444268A Tester valve with silicone liquid spring 公开/授权日：1984-04-24
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