发明授权
- 专利标题: Active matrix type display device and fabrication method of the same
- 专利标题(中): 有源矩阵型显示装置及其制造方法
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申请号: US09325260申请日: 1999-06-03
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公开(公告)号: US06172671B2公开(公告)日: 2001-01-09
- 发明人: Tsukasa Shibuya , Atsushi Yoshinouchi , Hongyong Zhang , Akira Takenouchi
- 申请人: Tsukasa Shibuya , Atsushi Yoshinouchi , Hongyong Zhang , Akira Takenouchi
- 优先权: JP8-315486 19961112
- 主分类号: G09G500
- IPC分类号: G09G500
摘要:
There is provided an active matrix type display in which thin film transistors having required characteristics are provided selectively in a pixel matrix portion and a peripheral driving circuit portion. In a structure having the pixel matrix portion and the peripheral driving circuit portion on the same substrate, N-channel type thin film transistors having source and drain regions formed through a non-self-alignment process and low concentrate impurity regions formed through a self-alignment process are formed in the pixel matrix portion and in an N-channel driver portion of the peripheral driving circuit portion. A P-channel type thin film transistor in which no low concentrate impurity region is formed and source and drain regions are formed only through the self-alignment process is formed in a P-channel driver portion of the peripheral driving circuit portion.
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