发明授权
US06176438B1 Suck back valve having sensor for detecting diaphragm displacement amount
有权
具有用于检测膜片位移量的传感器的回吸阀
- 专利标题： Suck back valve having sensor for detecting diaphragm displacement amount
- 专利标题（中）： 具有用于检测膜片位移量的传感器的回吸阀
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申请号： US09385092申请日： 1999-08-30
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公开(公告)号： US06176438B1公开(公告)日： 2001-01-23
- 发明人: Akio Sato , Tetsuro Maruyama , Yuji Tsuda
- 申请人： Akio Sato , Tetsuro Maruyama , Yuji Tsuda
- 优先权： JP10-244600 19980831
- 主分类号： B05B1502
- IPC分类号： B05B1502
摘要：
A suck back valve comprises an ON/OFF valve, a suck back mechanism, a first sensor for detecting a displacement amount of a first diaphragm of the ON/OFF valve, and a second sensor for detecting a displacement amount of a second diaphragm corresponding to a suction amount of a coating liquid. The suck back valve further comprises a control unit for feedback-controlling the valve displacement speed of the ON/OFF valve and the suction amount of the coating liquid on the basis of detection signals obtained by the first sensor and the second sensor respectively.
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