Process for the production of a final gaseous mixture comprising a carrier gas, an oxidizing gas and a silane, with a predetermined content of each of the three gaseous components, comprising the steps of: a) preparing a primary gaseous mixture comprising a neutral gas and the silane, wherein the silane is present in the primary gaseous mixture at a content below a self-ignition limit of that particular silane in air; b) providing a first gas stream, comprising the carrier gas and a controlled residual content of the oxidizing gas; c) preparing the final mixture according to one or other of the following two procedures, as a function of the residual content of oxidizing gas in the gas stream comprising the carrier gas: P1: mixing the first gas stream with a second stream of the primary gaseous mixture and with a third stream of the oxidizing gas in proportions which make it possible to obtain the final mixture, the addition of the oxidizing gas stream being carried out under dynamic conditions; P2: mixing the first gas stream with a second stream of the primary gaseous mixture, in proportions which make it possible to obtain the final mixture, the addition of the primary mixture stream being carried out under dynamic conditions.