发明授权
US06180485B2 Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits
有权
形成电容器,DRAM阵列和单片集成电路的方法
- 专利标题: Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits
- 专利标题(中): 形成电容器,DRAM阵列和单片集成电路的方法
-
申请号: US09323596申请日: 1999-06-01
-
公开(公告)号: US06180485B2公开(公告)日: 2001-01-30
- 发明人: Kunal R. Parekh , John K. Zahurak , Phillip G. Wald
- 申请人: Kunal R. Parekh , John K. Zahurak , Phillip G. Wald
- 主分类号: H01L2120
- IPC分类号: H01L2120
摘要:
The invention includes a number of methods and structures pertaining to semiconductor circuit technology, including: methods of forming DRAM memory cell constructions; methods of forming capacitor constructions; DRAM memory cell constructions; capacitor constructions; and monolithic integrated circuitry. The invention includes a method of forming a capacitor comprising the following steps: a) forming a mass of silicon material over a node location, the mass comprising exposed doped silicon and exposed undoped silicon; b) substantially selectively forming rugged polysilicon from the exposed undoped silicon and not from the exposed doped silicon; and c) forming a capacitor dielectric layer and a complementary capacitor plate proximate the rugged polysilicon and doped silicon. The invention also includes a capacitor comprising: a) a first capacitor plate; b) a second capacitor plate; c) a capacitor dielectric layer intermediate the first and second capacitor plates; and d) at least one of the first and second capacitor plates comprising a surface against the capacitor dielectric layer and wherein said surface comprises both doped rugged polysilicon and doped non-rugged polysilicon.
信息查询