发明授权
US06184545B2 Semiconductor component with metal-semiconductor junction with low reverse current 有权
具有低反向电流的金属半导体结的半导体元件

  • 专利标题: Semiconductor component with metal-semiconductor junction with low reverse current
  • 专利标题(中): 具有低反向电流的金属半导体结的半导体元件
  • 申请号: US09152827
    申请日: 1998-09-14
  • 公开(公告)号: US06184545B2
    公开(公告)日: 2001-02-06
  • 发明人: Wolfgang WernerJenoe Tihanyi
  • 申请人: Wolfgang WernerJenoe Tihanyi
  • 优先权: DE19740195 19970912
  • 主分类号: H01L2974
  • IPC分类号: H01L2974
Semiconductor component with metal-semiconductor junction with low reverse current
摘要:
The semiconductor component, such as a Schottky diode with a low leakage current, has a metal-semiconductor junction between a first metal electrode and the semiconductor. The semiconductor, which is of a first conductivity type, has a defined drift path and a plurality of supplementary zones of a second conductivity type extending from the semiconductor surface into the drift path. A number of foreign atoms in the supplementary zones is substantially equal to a number of foreign atoms in intermediate zones surrounding the supplementary zones and the number of foreign atoms does not exceed a number corresponding to a breakdown charge of the semiconductor.
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