发明授权
US06186865B1 Apparatus and method for performing end point detection on a linear planarization tool 失效
在线性平面化工具上进行端点检测的装置和方法

Apparatus and method for performing end point detection on a linear planarization tool
摘要:
A technique for utilizing a sensor to monitor fluid pressure from a fluid bearing located under a polishing pad to detect a polishing end point. A sensor is located at the leading edge of a fluid bearing of a linear polisher, which is utilized to perform chemical-mechanical polishing on a semiconductor wafer. The sensor monitors the fluid pressure to detect a change in the fluid pressure during polishing, which change corresponds to a change in the shear force when the polishing transitions from one material layer to the next.
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