发明授权
US06186865B1 Apparatus and method for performing end point detection on a linear planarization tool
失效
在线性平面化工具上进行端点检测的装置和方法
- 专利标题: Apparatus and method for performing end point detection on a linear planarization tool
- 专利标题(中): 在线性平面化工具上进行端点检测的装置和方法
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申请号: US09182532申请日: 1998-10-29
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公开(公告)号: US06186865B1公开(公告)日: 2001-02-13
- 发明人: Brian Thornton , Andrew J. Nagengast , Robert G. Boehm, Jr. , Anil K. Pant , Wilbur C. Krusell
- 申请人: Brian Thornton , Andrew J. Nagengast , Robert G. Boehm, Jr. , Anil K. Pant , Wilbur C. Krusell
- 主分类号: B24B722
- IPC分类号: B24B722
摘要:
A technique for utilizing a sensor to monitor fluid pressure from a fluid bearing located under a polishing pad to detect a polishing end point. A sensor is located at the leading edge of a fluid bearing of a linear polisher, which is utilized to perform chemical-mechanical polishing on a semiconductor wafer. The sensor monitors the fluid pressure to detect a change in the fluid pressure during polishing, which change corresponds to a change in the shear force when the polishing transitions from one material layer to the next.